Integration of III-nitrides with Silicon MEM Technology

admin Last updated on: May 8, 2023

Integration of III-nitrides with Silicon MEM Technology

Microelectromechanical devices integrating mechanical elements, sensors, actuators and electronics on a common silicon substrate through the utilisation of microfabrication technology.

1.4m II-V semiconductor processing cluster tool for GaN microfabrication:

Reactive ion etching

CVD dielectrics

PVD metallisation

Support of STS Ltd is gratefully acknowledged

Integration of III-nitrides with Silicon MEM Technology

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