Integration of III-nitrides with Silicon MEM Technology

admin Last updated on: May 8, 2023

Integration of III-nitrides with Silicon MEM Technology

    Microelectromechanical devices integrating mechanical elements, sensors, actuators and electronics on a common silicon substrate through the utilisation of microfabrication technology.

    1.4m II-V semiconductor processing cluster tool for GaN microfabrication:
  • Reactive ion etching
  • CVD dielectrics
  • PVD metallisation
    Support of STS Ltd is gratefully acknowledged

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